ExLASER Lite debut !
Its compact design is ideal for spot area high temperature heating.
Features
Compact design comparing with conventional ExLASER.
Spot substrate can be heated at area（φ0.5 mm） by 1 shot heating.
Exlaser Lite can be packed in one unit with wide truck also movable with attached caster.
Easy operation.
Fulfill capability of ultra high temperature ramping rate.
Only the target can be heated directly.
Case Study
Outline of heating method
Test equipment: ExLASER Lite (ELL-CT-050-FC13). Test material is set up in the vacuum chamber.
Temp. measuring points: Front and Back side of surface of test material.
Sampling data
ExLASER Lite achieved same average of temperature distribution and temperature ramping chart with conventional ExLASER even if its compact design!!
Temp. distribution
Temp. ramping chart
（0.5-Inch diameter×0.3t silicon cover panel in the vacuum of 10-3 Pascal）
