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ExLASER SERIES
ExLASER
Features , Applications
Case Study
Specifications
ExLASER Lite
Features , Case Study
Specifications
HOME > ExLASER series > [ExLASER] Features , Applications
  The "ExLASER" is a multi purpose rapid heating machine with LASER.

Features
 

Super high speed. Rapid heat-up, Rapid cool-down.
2 inch substrate can be evenly heated by ONE SHOT.
Only the target can be heated directly.
Temperature control is available depending on each thermal process.
Only the target can be heated Energy-saving.
   

Applications

Substrate heating in MBE machine.
   
Wafer annealing (SiC , GaAS etc. )
   
Available for surface annealing for top layer of multi layer device with device scaling.
  ...etc.

Sales reference
Japan Atomic Energy Agency

Laser power : 100W
Dimensions : H251×W200×D253(mm)